Rapid Thermal Processing: Science and Technology - Fair - Knjige - Elsevier Science Publishing Co Inc - 9780122476907 - 15. aprila 1993
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Rapid Thermal Processing: Science and Technology


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Discusses rapid thermal processing (RTP), an essential manufacturing technology for single-wafer processing in highly controlled environments. The text provides information on the suitability of RTP for thin film deposition, junction formation, silicides, epitaxy and "in situ" processing.


430 pages

Medij Knjige     Hardcover Book   (Knjiga s trdim hrbtom in platnicami)
Izdano 15. aprila 1993
ISBN13 9780122476907
Založniki Elsevier Science Publishing Co Inc
Strani 430
Dimenzije 152 × 229 × 25 mm   ·   725 g
Urednik Fair, Richard B.

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Ogled vseh Fair ( Na primer Hardcover Book , Paperback Book in Book )