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Rapid Thermal Processing: Science and Technology Fair
Rapid Thermal Processing: Science and Technology
Fair
Discusses rapid thermal processing (RTP), an essential manufacturing technology for single-wafer processing in highly controlled environments. The text provides information on the suitability of RTP for thin film deposition, junction formation, silicides, epitaxy and "in situ" processing.
430 pages
| Medij | Knjige Hardcover Book (Knjiga s trdim hrbtom in platnicami) |
| Izdano | 15. aprila 1993 |
| ISBN13 | 9780122476907 |
| Založniki | Elsevier Science Publishing Co Inc |
| Strani | 430 |
| Dimenzije | 152 × 229 × 25 mm · 725 g |
| Urednik | Fair, Richard B. |
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