Extreme Ultraviolet Lithography - Press Monographs - Harry J. Levinson - Knjige - SPIE Press - 9781510639393 - 30. decembra 2020
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Extreme Ultraviolet Lithography - Press Monographs


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Covers the many aspects of lithographic technology that needed to be addressed in order to make EUV lithography ready for high-volume manufacturing: exposure tools, light sources, masks, resists, process control, metrology, and computational lithography. Each topic is approached from the perspective of a practicing lithographer.


245 pages

Medij Knjige     Paperback Book   (Knjiga z mehkimi platnicami in lepljenim hrbtom)
Izdano 30. decembra 2020
ISBN13 9781510639393
Založniki SPIE Press
Strani 245
Dimenzije 252 × 176 × 16 mm   ·   440 g

Več od istega **izdajatelja**