Optical Inspection of Microsystems -  - Knjige - Taylor & Francis Ltd - 9780367390570 - 17. oktobra 2019
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This book offers a timely review of research into applying optical measurement techniques for microsystems. These techniques are non-invasive and fieldwise in character and have high sensitivity, accuracy, and resolution of data points. This text presents state-of-the-art methods of optical analysis and enumerates their basic components.


503 pages, 375 equations; 230 Halftones, black and white; 23 Tables, black and white; 479 Illustrati

Medij Knjige     Paperback Book   (Knjiga z mehkimi platnicami in lepljenim hrbtom)
Izdano 17. oktobra 2019
ISBN13 9780367390570
Založniki Taylor & Francis Ltd
Strani 532
Dimenzije 150 × 220 × 10 mm   ·   453 g
Jezik Angleščina  
Urednik serije Thompson, Brian J. (University of Rochester, New York, USA)

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