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Photonic Microsystems: Micro and Nanotechnology Applied to Optical Devices and Systems - MEMS Reference Shelf Olav Solgaard
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Photonic Microsystems: Micro and Nanotechnology Applied to Optical Devices and Systems - MEMS Reference Shelf
Olav Solgaard
This book describes Microelectromechanical systems (MEMS) technology and demonstrates how MEMS allow miniaturization, parallel fabrication, and efficient packaging of optics, as well as integration of optics and electronics.
648 pages, 361 black & white illustrations, 6 black & white tables
| Medij | Knjige Hardcover Book (Knjiga s trdim hrbtom in platnicami) |
| Izdano | 2. decembra 2008 |
| ISBN13 | 9780387290225 |
| Založniki | Springer-Verlag New York Inc. |
| Strani | 632 |
| Dimenzije | 155 × 235 × 34 mm · 1,05 kg |
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