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EUV Lithography Vivek Bakshi
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EUV Lithography
Vivek Bakshi
EUVL is an area of intense research and this book provides the foundation required for understanding and applying this technology. It offers contributions from the world's leading EUVL researchers, and provides all the critical information needed by practitioners and those wanting to enter the field.
700 pages, illustrations
| Medij | Knjige Hardcover Book (Knjiga s trdim hrbtom in platnicami) |
| Izdano | 15. decembra 2008 |
| ISBN13 | 9780470471555 |
| Založniki | John Wiley & Sons Inc |
| Strani | 704 |
| Dimenzije | 191 × 259 × 45 mm · 1,58 kg |
