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Specialty Gas Analysis: A Practical Guidebook JD Hogan
Specialty Gas Analysis: A Practical Guidebook
JD Hogan
The semiconductor industry is moving toward gas-phase reagents, increasing the relative importance of gas purity. Anyone who deals in the manufacturing of these devices needs to understand the technology available for modern gas analysis.
200 pages, appendices, index
| Medij | Knjige Hardcover Book (Knjiga s trdim hrbtom in platnicami) |
| Izdano | 27. decembra 1996 |
| Prvotni datum izida | 1997 |
| ISBN13 | 9780471185987 |
| Založniki | John Wiley & Sons Inc |
| Strani | 200 |
| Dimenzije | 161 × 241 × 16 mm · 503 g |
| Urednik | Hogan, Jeremiah D. |
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