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Optical Microscanners and Microspectrometers using Thermal Bimorph Actuators - Microsystems 2002 edition
Gerhard Lammel
Optical Microscanners and Microspectrometers using Thermal Bimorph Actuators - Microsystems 2002 edition
Gerhard Lammel
Shows how to design and fabricate optical microsystems using technologies and original architectures. This work explains a barcode scanner, laser projection mirror and a microspectrometer, starting from the system conception, discussing simulations, choice of cleanroom technologies, design, fabrication, and device test to the system assembly.
268 pages, biography
Media | Books Hardcover Book (Book with hard spine and cover) |
Released | January 31, 2002 |
ISBN13 | 9780792376552 |
Publishers | Springer |
Pages | 268 |
Dimensions | 156 × 234 × 17 mm · 576 g |
Language | English |
See all of Gerhard Lammel ( e.g. Hardcover Book and Paperback Book )