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Microlithography: Science and Technology Bruce W. Smith-Kazuaki Suzuki 3. izdaja
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Microlithography: Science and Technology
Bruce W. Smith-Kazuaki Suzuki
Like the bestselling original, this third edition of Microlithography is a self-contained text detailing both elementary and advanced aspects of submicron microlithography, offering a balanced treatment of theoretical and operating practices.
838 pages, 570 Illustrations, black and white
| Medij | Knjige Paperback Book (Knjiga z mehkimi platnicami in lepljenim hrbtom) |
| Izdano | 24. junija 2024 |
| ISBN13 | 9781032836737 |
| Založniki | Taylor & Francis Ltd |
| Strani | 850 |
| Dimenzije | 181 × 256 × 46 mm · 1,52 kg |
| Urednik | Smith, Bruce W. |
| Urednik | Suzuki, Kazuaki |
