Handbook of Sputter Deposition Technology: Fundamentals and Applications for Functional Thin Films, Nano-Materials and MEMS - Wasa, Kiyotaka (Matsushita Electric, Ltd. and Yokohama City University, Japan) - Books - William Andrew Publishing - 9781437734836 - November 20, 2012
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Handbook of Sputter Deposition Technology: Fundamentals and Applications for Functional Thin Films, Nano-Materials and MEMS 2nd edition

Wasa, Kiyotaka (Matsushita Electric, Ltd. and Yokohama City University, Japan)

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Handbook of Sputter Deposition Technology: Fundamentals and Applications for Functional Thin Films, Nano-Materials and MEMS 2nd edition

Faetures a team of contributing authors with backgrounds specializing in the various new applications of sputtering technology. This book introduces the fundamentals of thin films and sputtering deposition, explores the theory and practices of this field, and also covers new technology such as nano-functional materials and MEMS.

658 pages, black & white illustrations

Media Books     Hardcover Book   (Book with hard spine and cover)
Released November 20, 2012
ISBN13 9781437734836
Publishers William Andrew Publishing
Pages 660
Dimensions 239 × 163 × 40 mm   ·   1.04 kg

See all of Wasa, Kiyotaka (Matsushita Electric, Ltd. and Yokohama City University, Japan) ( e.g. Hardcover Book )