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Microlithography: Science and Technology Bruce W. Smith 3. izdaja
Microlithography: Science and Technology
Bruce W. Smith
Like the bestselling original, this third edition of Microlithography is a self-contained text detailing both elementary and advanced aspects of submicron microlithography, offering a balanced treatment of theoretical and operating practices.
900 pages, 570 black & white illustrations, 40 black & white tables
| Medij | Knjige Hardcover Book (Knjiga s trdim hrbtom in platnicami) |
| Izdano | 20. maja 2020 |
| ISBN13 | 9781439876756 |
| Založniki | Taylor & Francis Inc |
| Strani | 838 |
| Dimenzije | 150 × 220 × 20 mm · 1,62 kg |
| Jezik | Angleščina |
| Urednik | Smith, Bruce W. |
| Urednik | Suzuki, Kazuaki |
Več od istega **izdajatelja**
Ogled vseh Bruce W. Smith ( Na primer Blu-ray , Paperback Book in Hardcover Book )