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Optical Inspection of Microsystems, Second Edition
This book provides an up-to-date survey of the most important and widely used full-field optical metrology and inspection technologies. Techniques such as interference microscopy, laser Doppler vibrometry, holography, speckle metrology, spectroscopy and deflectrometry and digital holographic microscropy for the inspection of MEMS.
600 pages, 32 Illustrations, color; 525 Illustrations, black and white
| Medij | Knjige Hardcover Book (Knjiga s trdim hrbtom in platnicami) |
| Izdano | 25. junija 2019 |
| ISBN13 | 9781498779470 |
| Založniki | Taylor & Francis Inc |
| Strani | 570 |
| Dimenzije | 262 × 188 × 30 mm · 1,38 kg |
| Jezik | Angleščina |
| Urednik | Osten, Wolfgang (Universitat Stuttgart, Germany) |
