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Doping Engineering for Front-End Processing: Volume 1070 - MRS Proceedings B J Pawlak
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Doping Engineering for Front-End Processing: Volume 1070 - MRS Proceedings
B J Pawlak
The volume focuses on many aspects related to doping of semiconductors (Si, SiGe and Ge) for device fabrication, and explores areas for single-gate as well as multi-gate devices with planar and vertical architectures. Surface properties, coverage, bonding saturation and passivation, and annealing ambient are also discussed.
319 pages, illustrations
| Medij | Knjige Hardcover Book (Knjiga s trdim hrbtom in platnicami) |
| Izdano | 17. oktobra 2008 |
| ISBN13 | 9781605110400 |
| Založniki | Materials Research Society |
| Strani | 319 |
| Dimenzije | 152 × 228 × 23 mm · 566 g |
| Jezik | Angleščina |
| Urednik | Law, M. (University of Florida) |
| Urednik | Pawlak, B. J. |
| Urednik | Pelaz, M. L. (Universidad de Valladolid, Spain) |
| Urednik | Surugo, K. |
