Introduction to Focused Ion Beam Nanometrology - IOP Concise Physics - David C. Cox - Books - Morgan & Claypool Publishers - 9781681740201 - October 1, 2015
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Introduction to Focused Ion Beam Nanometrology - IOP Concise Physics

David C. Cox

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Introduction to Focused Ion Beam Nanometrology - IOP Concise Physics

This book describes modern focused ion beam microscopes and techniques and how they can be used to aid materials metrology and as tools for the fabrication of devices that in turn are used in many other aspects of fundamental metrology.

104 pages

Media Books     Paperback Book   (Book with soft cover and glued back)
Released October 1, 2015
ISBN13 9781681740201
Publishers Morgan & Claypool Publishers
Pages 104
Dimensions 253 × 178 × 8 mm   ·   163 g
Language English  
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