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Lithography
Landis
* Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents * A multidisciplinary technology, lithography continues to push the limits of optics, chemistry, mechanics, micro and nano-fluids, etc.
320 pages, Illustrations
| Medij | Knjige Hardcover Book (Knjiga s trdim hrbtom in platnicami) |
| Izdano | 19. novembra 2010 |
| ISBN13 | 9781848212022 |
| Založniki | ISTE Ltd and John Wiley & Sons Inc |
| Strani | 320 |
| Dimenzije | 240 × 163 × 29 mm · 744 g |
| Jezik | Angleščina |
| Urednik | Landis, Stefan (CEA-LETI-Minatec, Grenoble, France) |
