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Dry Etching Technology for Semiconductors Kazuo Nojiri 2015 edition
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Dry Etching Technology for Semiconductors
Kazuo Nojiri
Dry Etching Technology for Semiconductors
116 pages, 123 black & white illustrations, 5 black & white tables, biography
| Medij | Knjige Hardcover Book (Knjiga s trdim hrbtom in platnicami) |
| Izdano | 3. novembra 2014 |
| ISBN13 | 9783319102948 |
| Založniki | Springer International Publishing AG |
| Strani | 116 |
| Dimenzije | 165 × 242 × 12 mm · 362 g |
| Jezik | Angleščina Japonščina |
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