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System-level Modeling of MEMS - Advanced Micro and Nanosystems Tamara Bechtold
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System-level Modeling of MEMS - Advanced Micro and Nanosystems
Tamara Bechtold
System-level modeling of MEMS - microelectromechanical systems - comprises integrated approaches to simulate, understand, and optimize the performance of sensors, actuators, and microsystems, taking into account the intricacies of the interplay between mechanical and electrical properties, circuitry, packaging, and design considerations.
562 pages, Illustrations
| Medij | Knjige Hardcover Book (Knjiga s trdim hrbtom in platnicami) |
| Izdano | 6. februarja 2013 |
| ISBN13 | 9783527319039 |
| Založniki | Wiley-VCH Verlag GmbH |
| Strani | 562 |
| Dimenzije | 175 × 244 × 32 mm · 1,32 kg |
| Jezik | Angleščina |
| Urednik | Brand, Oliver |
| Urednik | Fedder, Gary K. |
| Urednik | Hierold, Christofer |
| Urednik | Korvink, Jan G. |
| Urednik | Tabata, Osamu |
![Cover for Tamara Bechtold · Fast Simulation of Electro-Thermal MEMS: Efficient Dynamic Compact Models - Microtechnology and MEMS (Hardcover Book) [2007 edition] (2006)](https://imusic.b-cdn.net/images/item/original/128/9783540346128.jpg?tamara-bechtold-2006-fast-simulation-of-electro-thermal-mems-efficient-dynamic-compact-models-microtechnology-and-mems-hardcover-book&class=scaled&v=1418639102)
