CMOS Cantilever Sensor Systems: Atomic Force Microscopy and Gas Sensing Applications - Microtechnology and MEMS - D. Lange - Knjige - Springer-Verlag Berlin and Heidelberg Gm - 9783642077289 - 4. decembra 2010
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CMOS Cantilever Sensor Systems: Atomic Force Microscopy and Gas Sensing Applications - Microtechnology and MEMS Softcover reprint of the original 1st ed. 2002 edition

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This book is intended for scientists and engineers in the field of micro- and nano electro-mechanical systems (MEMS and NEMS) and introduces the development of cantilever-based sensor systems using CMOS-compatible micromachining from the design concepts and simulations to the prototype.


150 pages, biography

Medij Knjige     Paperback Book   (Knjiga z mehkimi platnicami in lepljenim hrbtom)
Izdano 4. decembra 2010
ISBN13 9783642077289
Založniki Springer-Verlag Berlin and Heidelberg Gm
Strani 142
Dimenzije 155 × 235 × 8 mm   ·   222 g
Jezik Angleščina  

Več od istega **izdajatelja**