Reactive Sputter Deposition - Springer Series in Materials Science -  - Knjige - Springer-Verlag Berlin and Heidelberg Gm - 9783642095368 - 25. novembra 2010
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Reactive Sputter Deposition - Springer Series in Materials Science Softcover reprint of hardcover 1st ed. 2008 edition

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In this valuable work, all aspects of the reactive magnetron sputtering process, from the discharge up to the resulting thin film growth, are described in detail, allowing the reader to understand the complete process.


590 pages, 336 black & white illustrations, 5 colour illustrations, 37 black & white tables

Medij Knjige     Paperback Book   (Knjiga z mehkimi platnicami in lepljenim hrbtom)
Izdano 25. novembra 2010
ISBN13 9783642095368
Založniki Springer-Verlag Berlin and Heidelberg Gm
Strani 572
Dimenzije 155 × 235 × 31 mm   ·   885 g
Jezik Nemščina  
Urednik Depla, Diederik
Urednik Mahieu, Stijn

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