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Micro and Nano Fabrication: Tools and Processes Hans H. Gatzen Softcover reprint of the original 1st ed. 2015 edition
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Micro and Nano Fabrication: Tools and Processes
Hans H. Gatzen
For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control.
545 pages, 303 black & white illustrations, 54 colour illustrations, 25 black & white tables, biogra
| Medij | Knjige Paperback Book (Knjiga z mehkimi platnicami in lepljenim hrbtom) |
| Izdano | 6. oktobra 2016 |
| ISBN13 | 9783662508268 |
| Založniki | Springer-Verlag Berlin and Heidelberg Gm |
| Strani | 519 |
| Dimenzije | 155 × 235 × 28 mm · 757 g |
| Jezik | Francoščina |
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