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Rapid Thermal Processing of Semiconductors - Microdevices Victor E. Borisenko Softcover reprint of the original 1st ed. 1997 edition
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Rapid Thermal Processing of Semiconductors - Microdevices
Victor E. Borisenko
Rapid thermal processing has contributed to the development of single wafer cluster processing tools and other innovations in integrated circuit manufacturing environments. Borisenko and Hesketh review theoretical and experimental progress in the field, discussing a wide range of materials, processes, and conditions.
384 pages, black & white illustrations
| Medij | Knjige Paperback Book (Knjiga z mehkimi platnicami in lepljenim hrbtom) |
| Izdano | 20. junija 2013 |
| ISBN13 | 9781489918062 |
| Založniki | Springer-Verlag New York Inc. |
| Strani | 358 |
| Dimenzije | 155 × 235 × 20 mm · 535 g |
| Jezik | Angleščina |
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