Dry Etching for VLSI - Updates in Applied Physics and Electrical Technology - A.j. Van Roosmalen - Knjige - Springer-Verlag New York Inc. - 9781489925688 - 29. maja 2013
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Dry Etching for VLSI - Updates in Applied Physics and Electrical Technology Softcover reprint of the original 1st ed. 1991 edition

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This book has been written as part of a series of scientific books being published by Plenum Press. This book is unique in that it gives a compact, yet complete, in-depth overview of fundamentals, systems, processes, tools, and applications of etching with gas plasmas for VLSI.


256 pages, black & white illustrations

Medij Knjige     Paperback Book   (Knjiga z mehkimi platnicami in lepljenim hrbtom)
Izdano 29. maja 2013
ISBN13 9781489925688
Založniki Springer-Verlag New York Inc.
Strani 237
Dimenzije 178 × 254 × 13 mm   ·   449 g
Jezik Angleščina  

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