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Advanced MEMS / NEMS Fabrication and Sensors 2022 edition
Advanced MEMS / NEMS Fabrication and Sensors
This book begins by introducing new and unique fabrication, micromachining, and integration manufacturing methods for MEMS (Micro-Electro-Mechanical Systems) and NEMS (Nano-Electro-Mechanical Systems) devices, as well as novel nanomaterials for sensor fabrications.
312 pages, 75 Tables, color; 157 Illustrations, color; 10 Illustrations, black and white; VI, 312 p.
| Medij | Knjige Paperback Book (Knjiga z mehkimi platnicami in lepljenim hrbtom) |
| Izdano | 13. oktobra 2022 |
| ISBN13 | 9783030797515 |
| Založniki | Springer Nature Switzerland AG |
| Strani | 312 |
| Dimenzije | 150 × 220 × 10 mm · 583 g |
| Jezik | Nemščina |
| Urednik | Yang, Zhuoqing |
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